发明名称 三次元のマイクロ構造体、少なくとも2つの三次元のマイクロ構造体を備えたアッセンブリ、マイクロ構造体を製作するための方法およびマイクロ構造体の使用
摘要 A three-dimensional micro-structure has a plurality of adjacent micro-columns which are arranged at a distance from each other and essentially parallel in relation to the respective longitudinal extension. The micro-columns are made of at least one micro-column material having respectively an aspect ratio in the region of 20-1000 and respectively a micro-column diameter in the region of 0.1 μm-200 μm. A micro-column intermediate chamber is arranged between adjacent micro-columns having a micro-column distance selected from between the adjacent micro-columns in the region of 1 μm-100 μm. According to a method for producing the three-dimensional micro-structures: a) a template is provided with template material, b) the micro-column material is arranged in the column-like cavities, and c) the template is at least partially removed.
申请公布号 JP5631404(B2) 申请公布日期 2014.11.26
申请号 JP20120531323 申请日期 2010.09.20
申请人 シーメンス アクチエンゲゼルシヤフトSiemens Aktiengesellschaft 发明人 ハリー ヘードラー;イェアク ツァプフ
分类号 B81B1/00;B81C99/00 主分类号 B81B1/00
代理机构 代理人
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