| 摘要 |
The present invention is targeted at a sensor device including a silicon-based optical sensor, especially a color sensor for a colorimetric purpose. The purpose of the present invention is to find a new possibility for suppressing an interference ripple generated to an optical sensor when a member with an optically functional coating to enable simple manufacture without a complicated compatible layer is added. A sensor passivation is formed of a reflection preventing layer (13) of Si3N4 matched with a thin SiO2 layer of 5 to 10nm range. A sensor filled according to the present invention includes a passivating substrate (2), a shape (11) between a sensor surface and a unit of adhesive (31) when returning at least one optical filter (21), a related optical filter (connected to the sensor by 21), optical layers(32,33), and a part (11) of a change (Δh) of a height on the sensor surface to be related to a low refractive index (n2). |
