METHOD OF REMOVING A COATING OF A SUBSTRATE

摘要

A method of removing a coating of a substrate comprises a series of steps. A substrate is provided, the substrate including a feature on a surface of the substrate. The surface of the feature has a coating. The surface of the substrate is imaged to provide information about the feature. A portion of the coating is removed by a laser source. The surface of the substrate is imaged to provide information about a coating thickness of the coating of the surface of the feature. A boundary is calculated between a first area including the coating and a second area with the coating substantially removed. A portion of the coating in the first area within the boundary is removed using a laser source.