发明名称 |
METHOD OF MANUFACTURING MICRO PATTERN HAVING HIGH RESOLUTION |
摘要 |
<p>The present invention relates to a method of manufacturing a micro pattern having high resolution. A method of manufacturing a micro pattern having high resolution according to the present invention includes the steps of: (A) patterning to form a selectively recessed pattern part (115) on one surface of an insulating layer (110) by using a first stamp (120) having a patterned protrusion part; (B) performing a hydrophilic process on the insulating layer (110); (C) transferring a hydrophilic thin film (130) to a region excluding a pattern part (115) on one surface of the insulating layer (110); (D) forming ink (140) in the pattern part (115) by inject printing or spin coating; and (E) removing the hydrophilic thin film (130) to leave the ink (140) only in the pattern part (115).</p> |
申请公布号 |
KR101460072(B1) |
申请公布日期 |
2014.11.10 |
申请号 |
KR20130059810 |
申请日期 |
2013.05.27 |
申请人 |
INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY ERICA CAMPUS |
发明人 |
OH, JE HOON;LEE, CHANG KYU |
分类号 |
H01L21/027 |
主分类号 |
H01L21/027 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|