发明名称 METHOD OF MANUFACTURING MICRO PATTERN HAVING HIGH RESOLUTION
摘要 <p>The present invention relates to a method of manufacturing a micro pattern having high resolution. A method of manufacturing a micro pattern having high resolution according to the present invention includes the steps of: (A) patterning to form a selectively recessed pattern part (115) on one surface of an insulating layer (110) by using a first stamp (120) having a patterned protrusion part; (B) performing a hydrophilic process on the insulating layer (110); (C) transferring a hydrophilic thin film (130) to a region excluding a pattern part (115) on one surface of the insulating layer (110); (D) forming ink (140) in the pattern part (115) by inject printing or spin coating; and (E) removing the hydrophilic thin film (130) to leave the ink (140) only in the pattern part (115).</p>
申请公布号 KR101460072(B1) 申请公布日期 2014.11.10
申请号 KR20130059810 申请日期 2013.05.27
申请人 INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY ERICA CAMPUS 发明人 OH, JE HOON;LEE, CHANG KYU
分类号 H01L21/027 主分类号 H01L21/027
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