| 摘要 |
<p>The present invention proposes a method for manufacturing a transparent substrate for light extraction. The method includes forming an SiO2 layer on a transparent substrate such as a glass panel, producing a mixture by mixing one or more among nano-sized metal powder, nano-sized ceramic powder, and nano-sized polymer powder with a polar solvent, forming a nano pattern layer by spraying the mixture on the transparent substrate with an electrostatic sprayer, patterning the SiO2 layer by drying and dry etching the nano pattern layer, and removing the nano pattern layer by wet etching, thereby producing a transparent substrate for light extraction with an SiO2 nanostructure. Equipment costs can be greatly reduced by performing the process for forming a nano pattern layer by electrostatic spraying in the atmosphere of the clean room without a chamber.</p> |
