Semiconductor die with protective layer and related method of processing a semiconductor wafer

摘要

A semiconductor die and a related method of processing a semiconductor wafer are disclosed in which a first interlayer insulator having a recess region of varying configuration and defining a scribe line is associated with at least one protective layer formed with a characterizing inclined side surface.

主权项

1. A method of forming dies on a semiconductor wafer, the method comprising:
providing a semiconductor substrate structure comprising a wafer, wherein the semiconductor substrate structure has a principal surface; forming at least one multi-layer structure on the principal surface of the semiconductor substrate structure, wherein the multi-layer structure has an upper surface and a side surface that meet at an angle; creating a scribe line for the wafer by forming a recessed region of the semiconductor substrate structure adjacent to the side surface of the multi-layer structure, wherein the forming of the recessed region comprises forming a recess in the principal surface of the semiconductor substrate structure; and forming, in adherence with at least one surface of the recessed region that defines the recess, at least one protective layer covering the multi-layer structure and having an arcuate convex outer surface that covers the portion of the multi-layer structure where the upper surface of the multi-layer structure meets the side surface of the multi-layer structure at an angle wherein the forming of the at least one protective layer comprises forming a silicon oxide layer with a density plasma chemical vapor deposition process on the multi-layer structure, and forming a silicon nitride layer, and forming a second protective coating on the silicon nitride layer.