发明名称 |
APPARATUS FOR CROSS BEAM AND PROCESSING SUBSTRATE |
摘要 |
<p>The present invention relates to a beam for a support stand and a substrate processing apparatus applying the same. The embodiment of the present invention includes a tubular structure which is formed by combining a plurality of planar processing materials and is made of metal materials with a square pillar shape and a reinforcement material which is repetitively laminated by winding the outside of the tubular structure several times.</p> |
申请公布号 |
KR20140125270(A) |
申请公布日期 |
2014.10.28 |
申请号 |
KR20130069626 |
申请日期 |
2013.06.18 |
申请人 |
AP SYSTEMS INC. |
发明人 |
LEE, SEOK JEONG;PARK, SANG OH |
分类号 |
G02F1/13;B05C5/02 |
主分类号 |
G02F1/13 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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