Capacitive electromechanical transducer apparatus and method for adjusting its sensitivity

摘要

A technology that makes it possible to adjust, through processing, an output signal sent from a capacitive electromechanical transducer apparatus such as a CMUT upon reception of an elastic wave is provided.;A capacitive electromechanical transducer apparatus 100 includes cells 102 that include a first electrode 104 and second electrodes 106, each of which is disposed so as to be opposite the first electrode 104 with a cavity 105 therebetween. In the capacitive electromechanical transducer apparatus 100, at least one of the cells 102 includes a processed unit on which at least either addition of a material or removal of a material is performed as processing.

主权项

1. A capacitive electromechanical transducer apparatus comprising:
cells each including a first electrode and second electrode which is opposite the first electrode with a cavity therebetween, wherein at least one of the cells includes an additional material compared with another cell of the cells or lacks a material compared with another cell of the cells.