| 发明名称 |
PELLICLE AND AN ASSEMBLY OF PHOTOMASK PLUS PELLICLE |
| 摘要 |
A pellicle was well as an assembly of photomask plus pellicle is proposed in which the conventional agglutinant layer which bonds the pellicle to photomask is replaced by male and female screws and elastic body layer; in particular the pellicle frame is screwed to the photomask while the sealing of the space within the pellicle frame is secured by the elastic body layer. |
| 申请公布号 |
US2014315122(A1) |
申请公布日期 |
2014.10.23 |
| 申请号 |
US201414245689 |
申请日期 |
2014.04.04 |
| 申请人 |
SHIN-ETSU CHEMICAL CO., LTD. |
发明人 |
Sekihara Kazutoshi |
| 分类号 |
G03F1/64;G03F1/22 |
主分类号 |
G03F1/64 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A pellicle comprising a pellicle frame having at least four side bars, wherein at each one of at least four corners of said pellicle frame is cut a female screw extending from a first face of said pellicle frame, which is designed to oppose a photomask, towards an opposite second face of said pellicle frame, which is designed to receive a pellicle membrane, and an endless elastic body layer is provided on said first face in a manner such that said elastic body layer lies inward from said female screws. |
| 地址 |
Tokyo JP |
