| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve throughput or efficiency in processing of a sample.SOLUTION: There are provided a wafer number determination step which determines whether or not the number of wafers in transportation present on a transportation path is a predetermined value or less before an arbitrary one wafer is delivered from a cassette, a remaining process time determination step which determines whether or not a total of a remaining processing time of the wafer present in a vacuum transportation container scheduled to be processed and a process time of the wafer in transportation present on the transportation path is a predetermined value or less, and a transportation order skip step in which, if a condition of the wafer number determination step or the remaining process time determination step is not met, the wafer number determination step and the remaining process time determination step are performed with a wafer after the arbitrary one wafer in the transportation order, and a wafer that satisfies the condition of the steps first is determined as the wafer delivered next from the cassette instead of the arbitrary one wafer.</p> |
