Organic layer deposition apparatus

摘要

An organic layer deposition apparatus for forming an organic layer while a substrate is being moved, in which an interval between the substrate and the organic layer deposition apparatus can be measured at a vacuum condition.

主权项

1. A method of forming an organic layer on a substrate of an organic light-emitting display apparatus within a vacuum chamber, the method comprising:
arranging the substrate to face an organic layer deposition apparatus; and discharging a deposition material via a deposition source of the organic layer deposition apparatus onto the substrate; wherein a deposition source nozzle unit of the organic layer deposition apparatus is located at a side of the deposition source, the deposition source nozzle unit including a plurality of deposition source nozzles arranged in a first direction; wherein a patterning slit sheet of the organic layer deposition apparatus is located to be between the deposition source nozzle unit and the substrate, the patterning slit sheet having a plurality of patterning slits arranged in a second direction perpendicular to the first direction, all the plurality of pattern slits being extended in the first direction; wherein an interval measuring unit of the organic layer deposition apparatus is located in the vacuum chamber and configured to measure a distance between the substrate and the patterning slit sheet; and wherein the organic layer deposition apparatus is configured to perform deposition while the substrate or the organic layer deposition apparatus is moved relative to the other in the first direction at a distance from the other so that the patterning slit sheet provides a plurality of lines of the discharged deposition material along the first direction on the substrate.