| 摘要 |
PROBLEM TO BE SOLVED: To realize accurate positioning between a substrate and a mask in the manufacturing of an electronic component.SOLUTION: An alignment mark M1 and an alignment mark M2 are respectively provided at a substrate and a mask. A pattern of an electronic circuit, which is printed to the substrate, is formed at the mask. A control unit performs positioning between the mask and the substrate on the basis of the alignment marks M1, M2. The alignment mark M2 has a shape enclosing the alignment mark M1. The alignment mark M2 has a stepped pattern at the inner side thereof. |
