发明名称 PIEZOELECTRIC ELEMENT MODULE, ULTRASONIC TRANSDUCER, ULTRASONIC DEVICE, LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS, AND PIEZOELECTRIC ELEMENT MODULE MANUFACTURING METHOD
摘要 A first piezoelectric element having a first piezoelectric layer and a second piezoelectric element having a second piezoelectric layer, which is different from the first piezoelectric layer, are included on the same substrate. The first piezoelectric layer has a d constant greater than a d constant of the second piezoelectric layer.
申请公布号 US2014292941(A1) 申请公布日期 2014.10.02
申请号 US201414223293 申请日期 2014.03.24
申请人 SEIKO EPSON CORPORATION 发明人 KOBAYASHI Tomokazu;NISHIWAKI Tsutomu
分类号 B06B1/06;B41J2/045 主分类号 B06B1/06
代理机构 代理人
主权项 1. A piezoelectric element module comprising: a first piezoelectric element having a first piezoelectric layer; and a second piezoelectric element having a second piezoelectric layer different from the first piezoelectric layer, the first piezoelectric element and the second piezoelectric element being on the same substrate, wherein the first piezoelectric layer has a d constant greater than a d constant of the second piezoelectric layer.
地址 Tokyo JP