DELIVERY METHOD OF PLATE-LIKE OBJECT TO BE CARRIED, DELIVERY APPARATUS OF THE SAME, AND PATTERN FORMING APPARATUS

摘要

The present invention relates to a delivery method of a plate-like object to be carried which excellently delivers the plate-like object in a state that a lower peripheral portion is supported by a first holding unit to a second holding unit to absorb a top surface of the plate-like object to be carried in the upward direction of the first holding unit. The delivery method of a plate-like object to be carried includes: a first absorbing step of absorbing a first absorbing position of a top surface of a plate-like object to be processed held by the first holding unit by descending a first absorbing member from a first through hole formed through the second holding unit upward and downward; a second absorbing step of absorbing a second absorbing position other than the first absorbing position among the top surface of the plate-like object to be carried by descending a second absorbing member from a second through hole formed through the second holding unit at a position other than the first through hole; and a moving step of descending the first absorbing member and the second absorbing member holding the plate-like object to be carried and retreating the first absorbing member and the second absorbing member in the first through hole and the second through hole to move the plate-like object to be carried from the first holding unit to the second holding unit.