| 摘要 |
<p>The present invention provides an apparatus for treating perfluorides, in which a water overuse or water drain in pre-treatment may be avoided and solids in gas including perfluorides may be removed, which makes it difficult for a filter or the like to be clogged. The apparatus (2) for treating perfluorides, includes: a pre-treatment unit (21) pre-treating apparatus-inlet exhaust gas; a heating means (a first heater (221) and a second heater (222)) heating the apparatus inlet exhaust gas and water, and also hydrolyzing the perfluorides by using a catalyst to generate a decomposed gas containing an acidic gas; a heat exchanger (231) disposed at a front end and a rear end of the heating means and performing heat exchange between the apparatus-inlet exhaust gas, water, and the decomposed gas; and an acidic component remover (232) removing acidic components using a dry method, wherein the preprocess unit (21) includes an inlet heater (211) heating the apparatus-inlet exhaust gas to evaporate a liquid contained in the apparatus-inlet exhaust gas, i.e., water, and filters (212, 212a) removing solids from the apparatus-inlet exhaust gas.</p> |
