发明名称 |
TOROIDAL PLASMA ABATEMENT APPARATUS AND METHOD |
摘要 |
An apparatus for abatement of gases is provided. The apparatus includes a toroidal plasma chamber having a plurality of inlets and an outlet, and at least one chamber wall. One or more magnetic cores are disposed relative to the toroidal plasma chamber. The plasma chamber confines a toroidal plasma. A second gas inlet is positioned on the toroidal plasma chamber between a first gas inlet and the gas outlet at a distance d from the gas outlet, such that a toroidal plasma channel volume between the first gas inlet and the second gas inlet in the is substantially filled by the inert gas, the distance d based on a desired residence time of the gas to be abated. |
申请公布号 |
WO2014152908(A1) |
申请公布日期 |
2014.09.25 |
申请号 |
WO2014US28194 |
申请日期 |
2014.03.14 |
申请人 |
MKS INSTRUMENTS, INC. |
发明人 |
CHEN, XING;POKIDOV, ILYA;TIAN, ARTHUR;TRAN, KEN;LAM, DAVID;WENZEL, KEVIN, W. |
分类号 |
B01D53/32;B01J12/00;H01J37/32 |
主分类号 |
B01D53/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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