| 摘要 |
The present invention relates to an apparatus for supporting a substrate, including a support plate for fixating a substrate on one side; a heating body installed inside the support plate; a support shaft connected to the other side of the support plate, while elongated in the length direction; a thermometer having at least one portion positioned inside the support shaft; and a clamp detachably coupled to the support shaft to fixate the thermometer to the support shaft. The clamp is mounted to cover at least one portion of the end of the support shaft, while having a stand hole penetrating in the length direction. |
