Sensor system and method for calibrating a sensor system

摘要

A sensor system having a substrate and a mass which is movably suspended relative to the substrate is described, the sensor system including detection arrangement for detecting a deflection of the seismic mass relative to the substrate along a deflection direction, the detection arrangement including a first measuring electrode affixed to the substrate and a second measuring electrode affixed to the substrate, and a first overlap, which is perpendicular to the deflection direction, between the first measuring electrode and the seismic mass along the deflection direction is greater than a second overlap, which is perpendicular to the deflection direction, between the second measuring electrode and the seismic mass.

主权项

1. A sensor system, comprising:
a substrate, a seismic mass movably suspended relative to the substrate; and a detection arrangement to detect a deflection of the seismic mass relative to the substrate along a deflection direction, the detection arrangement including a first measuring electrode affixed to the substrate and a second measuring electrode affixed to the substrate, wherein a first overlap between the first measuring electrode and the seismic mass is larger than a second overlap between the second measuring electrode and the seismic mass, wherein an evaluation unit is configured to calibrate the sensor system as a function of a calibration factor that corresponds to:
a first capacitance between the first measuring electrode and the seismic mass,a second capacitance between the second measuring electrode and the seismic mass, andan overlap difference between the first overlap and the second overlap wherein the calibration factor also corresponds to a ratio between a voltage difference and the overlap difference of the first measuring electrode and the second measuring electrode relative to the seismic mass.