发明名称 METHOD FOR PRODUCING INFRARED REFLECTION FILM
摘要 PROBLEM TO BE SOLVED: To provide a method for producing an infrared reflection film superior in adiabaticity, durability, visible light transmittance and adhesion of an infrared reflection layer and superior in productivity.SOLUTION: A method for producing an infrared reflection film comprising: a metal layer forming step for forming a metal layer (25) on a transparent film substrate (10); a metal oxide layer forming step for forming a front side metal oxide layer by a direct current sputtering directly onto the metal layer (25); and a transparent protective layer forming step for forming a transparent protective layer (22) on the metal oxide layer in that order, in which a sputter target used in the direct current sputtering in the metal oxide layer forming step contains zinc atoms and tin atoms, the target formed by sintering metal oxide of at least one of zinc oxide and tin oxide and metal powder is used, and oxygen concentration of an inert gas and oxygen gas introduced in a sputtering deposition chamber is 8 volume% or less.
申请公布号 JP2014167163(A) 申请公布日期 2014.09.11
申请号 JP20140012215 申请日期 2014.01.27
申请人 NITTO DENKO CORP 发明人 WATANABE MASAHIKO;OMORI YUTAKA
分类号 C23C14/34;B32B9/00;B32B15/01;B32B15/04;B32B27/00;C03C17/32;C23C14/06 主分类号 C23C14/34
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