| 摘要 |
PROBLEM TO BE SOLVED: To provide a method excellent in controllability with a simple apparatus, capable of obtaining a MgZnO-based crystal safely and easily.SOLUTION: A formation method of a MgZnO-based crystal has a step S1 for forming a diffusion auxiliary layer by applying a carbonate as a diffusion auxiliary material on a ZnO crystal, a step S2 for covering the diffusion auxiliary layer with a MgZnO crystal body, and a step S3 for diffusing Mg in the MgZnO crystal body into the ZnO crystal by performing heat treatment of a laminate comprising the ZnO crystal, the diffusion auxiliary layer and the MgZnO crystal body. |
