| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate for liquid discharge head and a liquid discharge head in which oxidization of an intermediate layer between an isolation layer and a protective layer is prevented, and adhesion of the isolation layer and adhesion of the protective layer are excellent.SOLUTION: An intermediate layer contacting with an isolation layer and a protective layer of a substrate for a liquid discharge head, includes a material represented by TaSiN(x=5-80 at.%, y=3-60 at.%, z=10-60 at.% (where, x+y+z=100 at.%)). |
