<p>An optical assembly (28) serves for rotating the polarization of linearly polarized incident input light (3a) and for generating linearly polarized emergent output light (3b). The assembly (28) is embodied such that a polarization of the input light (3 a) is rotated by a polarization rotation angle that is greater than 10°. At least one p-mirror (M2) is arranged for reflecting p-polarized incident light such that the p-polarized light is incident with an angle (a) of incidence that deviates from a 45° angle by at least 10°. This results in an optical assembly which provides linearly polarized output light having a predefined polarization direction with the lowest possible throughput losses.</p>
申请公布号
WO2014131604(A1)
申请公布日期
2014.09.04
申请号
WO2014EP52523
申请日期
2014.02.10
申请人
CARL ZEISS SMT GMBH
发明人
RUOFF, JOHANNES;ZIMMERMANN, JÖRG;KRÄHMER, DANIEL;HENNERKES, CHRISTOPH;SÄNGER, INGO;SCHLESENER, FRANK