发明名称 |
ELECTRON MICROSCOPE |
摘要 |
<p>This electron microscope (20) comprises: a first imaging device (291); a second imaging device (240)that can be moved away from transmitted light (P); and another detection device (260). The second imaging device is disposed in an observation chamber (230) above the first imaging device, and an attachment portion (231) of the other detection device is disposed at a position rotated 90 degrees from the attachment position of the second imaging device on the same plane on which the second imaging device is disposed. Thus, the second imaging means and the other detector can be attached compactly to the observation chamber disposed on the table surface of a mount housing, whereby an electron microscope can be provided in which workability of the devices and effective use of the table surface are achieved.</p> |
申请公布号 |
EP2696363(A4) |
申请公布日期 |
2014.09.03 |
申请号 |
EP20120764716 |
申请日期 |
2012.02.29 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
NODA, HIROYUKI;ONUMA, MITSURU;NAGAOKI, ISAO;MAMISHIN, SHUICHI |
分类号 |
H01J37/244;H01J37/16;H01J37/22;H01J37/26 |
主分类号 |
H01J37/244 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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