High temperature furnace insulation

摘要

A high temperature furnace comprising hot zone insulation having at least one shaped thermocouple assembly port to reduce temperature measurement variability is disclosed. The shaped thermocouple assembly port has an opening in the insulation facing the hot zone that is larger than the opening on the furnace shell side of the insulation. A method for producing a crystalline ingot in a high temperature furnace utilizing insulation having a shaped thermocouple assembly port is also disclosed.

主权项

1. A method for producing a crystalline ingot in a furnace comprising a furnace shell and a hot zone, the method comprising the steps of:
heating a crucible containing at least feedstock material in the hot zone of the furnace to a temperature greater than or equal to 1000° C., wherein the hot zone comprises at least one heating element disposed above the crucible, and insulation surrounds the hot zone, the insulation being between the heating element and the furnace shell of the furnace, and the insulation having a heating element side facing the heating element and a furnace shell side facing the furnace shell; and measuring the temperature within the hot zone between the at least one heating element disposed above the crucible and the heating element side facing the heating element of the insulation with at least one thermocouple assembly inserted through a thermocouple assembly port formed in the insulation above the at least one heating element disposed above the crucible, the at least one thermocouple assembly being disposed in a position between the heating element and the heating element side of the insulation, wherein the thermocouple assembly port above the at least one heating element increases in size within the insulation from the furnace shell side of the insulation to the heating element side of the insulation and wherein the measured temperature is substantially insensitive to the position of the thermocouple assembly.