| 摘要 |
PROBLEM TO BE SOLVED: To prevent a scratch in a plate-like body due to contact with a liquid nozzle, liquid dripping, and reduction of coating speed.SOLUTION: A liquid filling device comprises: a plurality of holders 4 and 5 for holding plate-like bodies 2 and 3 by facing main surfaces of the plate-like bodies 2 and 3 for each other; a moving member 6 for moving the plurality of holders 4 and 5 close to or away from each other; a discharge nozzle 10 inserted into a gap between a pair of the facing plate-like bodies 2 and 3 to discharge filling liquid 7 into the gap; a nozzle moving mechanism 11 for moving the discharge nozzle 10 over an in-plane direction of the plate-like bodies 2 and 3; control means 21 for controlling the nozzle moving mechanism 11; a reservoir 15 for storing the filling liquid 7; and a pressurizing mechanism 13 for discharging the filling liquid 7 stored in the reservoir 15 through the discharge nozzle 10. The discharge nozzle 10 is coated with resin. |
