| 主权项 |
1. An epitaxial device module monolithically integrated with a CMOS structure, either a NMOS or a PMOS, in a bulk or thick-film SOI substrate, comprising
an active area on which an epitaxial layer stack is formed by selective or non-selective epitaxial growth, that is separate from a separate active area in which said CMOS structure is formed, single-crystalline epitaxial layer stack formed on a hard mask for epitaxy having an opening therein, localized ion implanted regions in said active area, with the same polarity of the source/drain regions of said CMOS structure, aligned with said opening in hard mask for epitaxy, thus self-aligned with said epitaxial layer stack, and formed before and/or after the epitaxial growth, an ion-implanted region of the same polarity of the source/drain regions of said CMOS structure, which overlaps the active area underneath the single-crystalline epitaxial layer stacks, a portion of the source/drain region of said CMOS structure, and an isolation region separating said two active areas, thereby establishing a conductive path underneath a portion of isolation region between said two active areas, wherein each of said localized ion implanted regions has lateral boundaries that are distant from the isolation region delimiting the active area on which epitaxial layer stack is grown. |
