| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device and an inspection method that are capable of detecting a defect in wiring in a non-contact manner even when the defect cannot be observed on a surface.SOLUTION: A substrate 10 is provided with a contact pad for making pixel regions 11 and gate lines into an all selected state, and a contact pad 12 for applying a common voltage to data lines. A sensor is mounted on an actuator mechanism and images the pixel regions 11. With the gate lines made into the all selected state via inspection pins and all the data lines set at the common voltage, four moire fringe images are obtained in each of which a pitch of the grid of the pixel regions is shifted by 1/4. A calculator calculates a phase in the pixel regions from the moire fringe images, compares a phase detected using a substrate where reference pixel regions are formed with a phase detected using a substrate where pixel regions to be inspected are formed, and detects a difference. |
