发明名称 |
DEFORMABLE MIRROR AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
A deformable mirror includes a mirror substrate having a continuous reflective surface and a plurality of actuators connected to the mirror substrate at a plurality of coupling portions. In the deformable mirror, the mirror substrate has first regions and a second region thicker than the first regions and the first regions are formed around the coupling portions. |
申请公布号 |
US2014232984(A1) |
申请公布日期 |
2014.08.21 |
申请号 |
US201414180889 |
申请日期 |
2014.02.14 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
Tamamori Kenji;Shimada Yasuhiro;Mizutani Fumiaki |
分类号 |
G02B26/08;A61B3/14 |
主分类号 |
G02B26/08 |
代理机构 |
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代理人 |
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主权项 |
1. A deformable mirror, comprising:
a mirror substrate having a continuous reflective surface; and a plurality of actuators connected to the mirror substrate at a plurality of coupling portions, wherein the mirror substrate has first regions and a second region thicker than the first regions and the first regions are formed around the coupling portions. |
地址 |
Tokyo JP |