发明名称 DEFORMABLE MIRROR AND METHOD FOR MANUFACTURING THE SAME
摘要 A deformable mirror includes a mirror substrate having a continuous reflective surface and a plurality of actuators connected to the mirror substrate at a plurality of coupling portions. In the deformable mirror, the mirror substrate has first regions and a second region thicker than the first regions and the first regions are formed around the coupling portions.
申请公布号 US2014232984(A1) 申请公布日期 2014.08.21
申请号 US201414180889 申请日期 2014.02.14
申请人 CANON KABUSHIKI KAISHA 发明人 Tamamori Kenji;Shimada Yasuhiro;Mizutani Fumiaki
分类号 G02B26/08;A61B3/14 主分类号 G02B26/08
代理机构 代理人
主权项 1. A deformable mirror, comprising: a mirror substrate having a continuous reflective surface; and a plurality of actuators connected to the mirror substrate at a plurality of coupling portions, wherein the mirror substrate has first regions and a second region thicker than the first regions and the first regions are formed around the coupling portions.
地址 Tokyo JP