Bell jar extraction tool method and apparatus for thin film photovoltaic materials

摘要

An apparatus for extracting a bell jar chamber from a processing station of a thin film photovoltaic material is provided. The apparatus includes a rack fixture coupled to a robot loader. The rack fixture is configured to support the bell jar chamber to be moved using the robot loader in a horizontal direction and in a vertical direction. The apparatus further includes at least two support members configured within a vicinity of an upper region of the rack fixture.

主权项

1. An apparatus for extracting a bell jar chamber from a processing station of a thin film photovoltaic material, the apparatus comprising:
a rack fixture coupled to a robot loader, the rack fixture being configured to support the bell jar chamber to be moved using the robot loader in a horizontal direction and in a vertical direction, the horizontal direction being normal to the vertical direction; and at least two support members configured within a vicinity of an upper region of the rack fixture, the two support members having respective arc length regions, the respective arc length regions supporting at least respective upper inner regions of the bell jar chamber.