Biological and Chemical Sensors

摘要

Device structures, fabrication methods, and design structures for a biological and chemical sensor used to detect a property of a substance. The device structure includes a drain and a source of a field effect transistor formed at a frontside of a substrate. A sensing layer is formed at a backside of the substrate. The sensing layer is configured to receive the substance.

主权项

1. A method of forming a sensor used to detect a property of a substance, the method comprising:
forming a drain and a source of a field effect transistor at a frontside of a substrate; forming a sensing layer that is configured to receive the substance and that is located at a backside of the substrate opposite from the frontside of the substrate; and forming a through silicon via (TSV) extending through the substrate and coupling the sensing layer with the field effect transistor, wherein the TSV has a tip that projects outwardly from the backside of the substrate, and the sensing layer is formed at least partially on the tip of the TSV.