Multilayered NONON membrane in a MEMS sensor

摘要

Various embodiments relate to a MEMS pressure sensor including: a lower electrode; a first insulating layer over the lower electrode; a second insulating layer over the first insulating layer that forms a cavity between the first and second insulating layers; an upper electrode over the second insulating layer, wherein a portion of the cavity is between the upper and lower electrodes; and a NONON pressure membrane over the upper electrode.

主权项

1. A MEMS pressure sensor comprising:
a lower electrode; an upper electrode over the lower electrode; an insulating layer between the lower and upper electrodes that forms a cavity between the upper and lower electrodes; and a NONON pressure membrane over the upper electrode.