发明名称 BAND SAW CUTTING DEVICE AND INGOT CUTTING METHOD
摘要 <p>The present invention provides a bandsaw cutting apparatus including an actuator configured to move static pressure pads forward and backward in a rotating direction of a blade, and a controller configured to control a movement distance and a movement speed of the static pressure pads to be moved by the actuator, wherein the ingot is cut by feeding the blade relatively downward toward and below the ingot while a rotating blade is guided with static pressure pads, and the movement of the static pressure pads is controlled with the controller. The apparatus can stably suppress a displacement of the blade during cutting, thereby cutting the ingot into blocks or sample wafers for crystal quality evaluation stably with good quality cut surface at a higher cutting rate and extending the lifetime of the blade.</p>
申请公布号 KR20140094548(A) 申请公布日期 2014.07.30
申请号 KR20147013449 申请日期 2012.10.15
申请人 SHIN-ETSU HANDOTAI CO., LTD. 发明人 NAKAGAWA KAZUYA
分类号 B28D5/04;B24B27/06;H01L21/304 主分类号 B28D5/04
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