Load chamber with heater for a disk sputtering system

摘要

A disk processing system having a plurality of processing chambers, a load chamber comprising a heater, and a disk transport system coupled to the plurality of processing chambers and the load chamber to transport a disk there among.

主权项

1. A method of operating a processing system, comprising:
transferring a disk to a load arm assembly inside of a load chamber at a first position; swinging the load arm assembly, securing the disk, from the first position to a second position being adjacent to a heater; heating the disk at the second position with the heater; and transferring the disk out of the load chamber after the heating, wherein heating the disk at the second position comprises heating the disk for less than 4 seconds with a heater having a power greater than 1.1 K Watts.