发明名称 |
METHOD FOR MANUFACTURING ELECTRONIC DEVICE |
摘要 |
Provided is a method for manufacturing an electronic device which can be produced on-demand and has an electrode pattern which can be formed simply with high degree of fineness. A first electrode pattern-shape layer (1) made of a material different from a substrate (1) and having a surface energy higher than the substrate (1) is formed on the substrate (1) with the gas-curtain laser CVD method, and a second layer (2) is formed with a conductive nano-ink on the upper surface of the first layer (1), and thus an electrode pattern for an electronic device is formed. |
申请公布号 |
WO2014112402(A1) |
申请公布日期 |
2014.07.24 |
申请号 |
WO2014JP50049 |
申请日期 |
2014.01.07 |
申请人 |
V TECHNOLOGY CO., LTD.;NATIONAL UNIVERSITY CORPORATION YAMAGATA UNIVERSITY |
发明人 |
MIZUKAMI MAKOTO;OKU SHINYA;TOKITO SHIZUO;JU MINCHUL;SUZUKI YOSHIKAZU |
分类号 |
H01L21/28;C23C16/48;H01L21/285;H01L21/288 |
主分类号 |
H01L21/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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