发明名称 METHOD FOR MANUFACTURING ELECTRONIC DEVICE
摘要 Provided is a method for manufacturing an electronic device which can be produced on-demand and has an electrode pattern which can be formed simply with high degree of fineness. A first electrode pattern-shape layer (1) made of a material different from a substrate (1) and having a surface energy higher than the substrate (1) is formed on the substrate (1) with the gas-curtain laser CVD method, and a second layer (2) is formed with a conductive nano-ink on the upper surface of the first layer (1), and thus an electrode pattern for an electronic device is formed.
申请公布号 WO2014112402(A1) 申请公布日期 2014.07.24
申请号 WO2014JP50049 申请日期 2014.01.07
申请人 V TECHNOLOGY CO., LTD.;NATIONAL UNIVERSITY CORPORATION YAMAGATA UNIVERSITY 发明人 MIZUKAMI MAKOTO;OKU SHINYA;TOKITO SHIZUO;JU MINCHUL;SUZUKI YOSHIKAZU
分类号 H01L21/28;C23C16/48;H01L21/285;H01L21/288 主分类号 H01L21/28
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