PIEZOELECTRIC ACTUATOR AND MANUFACTURING METHOD FOR PIEZOELECTRIC ACTUATOR

摘要

A piezoelectric actuator is realized which can be formed by means of a simpler configuration and a simpler manufacturing flow than in the related art. A fixed electrode (12) is formed in a base substrate (11). A dielectric layer (13) is formed on the surface of the base substrate (11). A lower electrode (14) that is at least partially separated from the base substrate (11) is formed on the surface of the dielectric layer (13). A piezoelectric layer (15) is formed on the surface of the lower electrode (14). An upper electrode (16) is formed on the side of the surface of the piezoelectric layer (15). At least a portion of the upper electrode (16) or the lower electrode (14) serves as a movable electrode, which can be moved by distortion of the piezoelectric layer (15) caused by application of a piezoelectric drive voltage.