| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve productivity. <P>SOLUTION: The method for manufacturing a piezoelectric vibrator having a piezoelectric vibration element, an element mounting member and a lid member includes: a step of forming a pattern, which provides a bonding pattern and a mounting pad on one main surface of an element mounting member wafer, and provides an external terminal on the other main surface; a step of forming a recess part, which forms the recess part on one main surface of a lid member wafer; a step of forming a groove part, which forms the groove part on the other main surface of the lid member wafer; a step of mounting the piezoelectric vibration element, which mounts the piezoelectric vibration element on the mounting pad; a layering step of superposing the element mounting member wafer and the lid member wafer; a step of bonding the wafers, which bonds the element mounting member wafer and the lid member wafer by irradiating a part at which the bonding pattern is brought into contact with the lid member wafer with a laser light having a wavelength of 1064 nm from a groove part side; and a step of cutting the wafers, which cuts the element mounting member wafer and the lid member wafer by irradiating the contacting part with a laser light having a wavelength of 532 nm. <P>COPYRIGHT: (C)2012,JPO&INPIT |
