发明名称 |
APPARATUS FOR TRANSFERING SUBSTRATE |
摘要 |
<p>An apparatus for transferring a substrate, according to the present invention, includes a robotic arm; and an end effector coupled to an end portion of the robotic arm, while having a vacuum duct prepared inside. The end effector includes vacuum holes funneled to the vacuum duct and performing a vacuum adsorption on the backside border of a substrate.</p> |
申请公布号 |
KR20140087122(A) |
申请公布日期 |
2014.07.09 |
申请号 |
KR20120154698 |
申请日期 |
2012.12.27 |
申请人 |
SEMES CO., LTD. |
发明人 |
JEONG, CHEOL HWAN;KIM, DAE HUN;YOU, JUN HO |
分类号 |
H01L21/677;B25J15/06;B65G49/07 |
主分类号 |
H01L21/677 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|