主权项 |
1. A method, comprising:
providing a substrate; forming a bottom anti-reflective coating (BARC) on the substrate, wherein the BARC includes a first portion overlying a second portion, the first and second portions having a different composition; forming a photoresist layer on the first portion of the BARC; irradiating the photoresist layer; and developing the photoresist layer, wherein the developing includes using a developer to remove a region of the photoresist layer and a region of the first and second portions of the BARC. |