SHAPE MEASUREMENT METHOD AND SHAPE MEASUREMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To achieve shape measurement at high accuracy and high speed by smoothly scanning a measuring surface with a stylus.SOLUTION: A relative movement to a measuring surface of a probe 26 is repeated (Steps 4 and 5). The relative movement includes: a parallel translation of moving a stylus 20 with respect to the measuring surface by a specified distance in the direction parallel with the measuring surface; and an orthogonal movement of moving the probe 26 in the normal direction of the measuring surface calculated from the difference between the present stylus position Sand the past stylus position Sso that the size in the direction orthogonal to the measuring surface of a stylus displacement vector Dincluding a displacement amount and displacement direction of the position of the stylus 20 with respect to the probe 26 is equal to a set value C of a predetermined pressing amount.