| 摘要 |
The present invention relates to a mask inspection device capable of accurately inspecting masks regardless of the type of the masks when inspecting the masks or accurately inspecting the masks even through the sheet of the masks are drooped, and a control method thereof. The mask inspection device comprises a mask transfer part for transferring the masks in a first direction or the opposite direction of the first direction; a displacement sensor part for obtaining information on a distance to the sheet of the masks transferred by the mask transfer part; a photographing part for inspecting the sheet of the masks transferred by the mask transfer part; a control part for outputting a height adjustment signal to control the height of the photographing part according to the distance information obtained by the displacement sensor part; and a height adjustment part for adjusting the height of the photographing part according to the height adjustment signal outputted from the control part. |
