pvd chamber and process for over-coating layer to improve emissivity for low emissivity coating

摘要

A method for making low emissivity panels, including control the ion characteristics, such as ion energy, ion density and ion to neutral ratio, in a sputter deposition process of a layer deposited on a thin conductive silver layer. The ion control can prevent or minimize degrading the quality of the conductive silver layer, which can lead to better transmittance in visible regime, block more heat transfer from the low emissivity panels, and potentially can reduce the requirements for other layers, so that the overall performance, such as durability, could be improved.

主权项

1. A method for coating a substrate, the method comprising
providing the substrate; depositing a first layer over the substrate,
wherein the first layer comprises a conductive material,wherein the thickness of the first layer is less than 20 nm; depositing a second layer on the first layer,
wherein the depositing is a sputter deposition process,wherein the sputter deposition process produces ion and neutral species;wherein the ion to neutral species ratio is altered by passing the ion and neutral species through a shield maintained at a voltage.