The present invention relates to a scroll pump with two scrolls that are co-operable for pumping fluid from an inlet to an outlet on relative orbiting motion of the scrolls. Each scroll comprises a scroll base from which a scroll wall extends generally axially towards the base of the opposing scroll. A gas conduit having an inlet at a first location of the pumping channel and an outlet at a second location of the pumping channel allows over-compression at the first location of the pumping channel to be exhausted to the second location of the pumping channel. A one-way valve located in the gas conduit allows the passage of gas through the conduit from the conduit inlet to the conduit outlet when a predetermined pressure differential between the first and second locations of the pumping channel is generated during roughing when the scroll inlet is at or close to atmosphere.
申请公布号
EP2742241(A2)
申请公布日期
2014.06.18
申请号
EP20120751587
申请日期
2012.08.09
申请人
EDWARDS LIMITED
发明人
STONES, IAN DAVID;HOCKLIFFE, MILES GEOFFERY;HOLBROOK, ALAN ERNEST KINNAIRD