| 摘要 |
The present invention relates to an in-line substrate processing system. The in-line substrate processing system of the present invention comprises: a process chamber in which each process module in a linear form is provided; a process line which is installed within the process chamber to perform each process while a substrate is transferred by being attached to a shuttle; a shuttle collect line for collecting the shuttle after the process is conducted to the substrate; a detachable module which attaches/detaches the substrate and the shuttle by being located at both ends of the process chamber; and an up-down module for connecting the process line of the process chamber and the shuttle collect line. Production of products with a fast takt time is possible by consisting the up-down module and the detachable module as one. |
