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发明名称
β型矽铝氮氧化物之制造方法
摘要
申请公布号
TWI440697
申请公布日期
2014.06.11
申请号
TW100118992
申请日期
2011.05.31
申请人
电气化学工业股份有限公司 日本
发明人
江本秀幸
分类号
C09K11/64;H01L33/50
主分类号
C09K11/64
代理机构
代理人
何金涂 台北市大安区敦化南路2段77号8楼;丁国隆 台北市大安区敦化南路2段77号8楼
主权项
地址
日本
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