| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an imprint method in which combination of releasability and transferability is achieved.SOLUTION: An imprint method includes: a step in which a mold having a concavity is prepared; a step in which a mold non-reaction material is charged in the concavity; a step in which the mold is pressed to a base material applied with a resist; a step in which the resist is cured in a state in which the mold is pressed; and a step in which the mold is separated from the base material. The mold non-reaction material is a material that does not perform chemical reaction with the mold. The resist is cured, thereby the resist and the mold non-reaction material are bonded. When the mold is separated from the base material, the resist and the mold non-reaction material are made to remain on the base material.</p> |
