发明名称 POSITIONING METHOD OF CONVEYANCE MECHANISM, POSITIONAL DISPLACEMENT AMOUNT CALCULATION METHOD OF OBJECT TO BE PROCESSED AND CORRECTION METHOD OF TEACHING DATA OF CONVEYANCE MECHANISM
摘要 PROBLEM TO BE SOLVED: To provide a positioning method of a conveyance mechanism for suppressing the risk of interference with an object to be processed by improving workability of a teaching operation and reducing tolerance between workers.SOLUTION: A positioning method of a conveyance mechanism is disclosed. The conveyance mechanism comprises a pick section which can be get closer to and away from a placement table. The placement table includes a holding pin part for holding a bottom face of a peripheral portion of an object to be processed, and is rotatable and vertically movable. The pick section includes, in the distal end thereof, a detection part for detecting the presence/absence of the object to be processed. The positioning method of the conveyance mechanism includes: a height direction determination step of detecting an upper edge of the holding pin part by means of the detection part to determine a height reference position of the pick section; a forward moving angle determination step of calculating a displacement angle between a radial direction of the placement table and a forward moving direction of the pick section to correct a forward moving angle of the pick section; a forward moving origin position determination step of calculating a displacement horizontal distance between the radial direction of the placement table and the forward moving direction of the pick section to correct a forward moving origin position of the pick section; and a forward moving amount determination step of determining a forward moving reference amount of the pick section from coordinates of the holding pin part.
申请公布号 JP2014099576(A) 申请公布日期 2014.05.29
申请号 JP20120279632 申请日期 2012.12.21
申请人 TOKYO ELECTRON LTD 发明人 KUBODERA MASATO;KIKUSHIMA HIROTO;YAMAGUCHI HIROSHI;SASAKI YOSHIAKI;YU MENG YIAU
分类号 H01L21/68 主分类号 H01L21/68
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