DISPOSITIVO GERADOR DE PLASMA RADIOFREQUÊNCIA, E, PROCESSO DE CONTROLE DA ALIMENTAÇÃO DO MESMO

摘要

The device has ignition plug coil type plasma generating circuits (BB1-BB4) connected in parallel on an outlet of a class E power amplifier type supply circuit (2). Each generating circuit presents a resonant frequency and generates plasma when a high voltage level is applied on the outlet at a frequency equal to the resonant frequency. A control device (5) controls the supply circuit and determines the frequency of a control signal among one of a set of resonant frequencies of the generating circuits to selectively control each generating circuit along the utilized frequency. An independent claim is also included for a method for controlling the supply of a radio frequency plasma generating device.