| 摘要 |
A substrate transfer apparatus is provided to transfer a substrate in a normal position by installing a substrate align member capable of fixing and aligning a substrate in a uniform position at all times. A robot arm is composed of at least one joint. A substrate support part(120) is connected to an end of the robot arm. A substrate align member(150) is formed at one end of the substrate support part. The substrate align member rotates in the horizontal and vertical directions of the substrate support part. A rotation axis is connected to one end of the substrate align member, and the other end of the substrate align member float along the rotation axis to rotate. |
