| 摘要 |
A cylindrical annular detector is disposed at the periphery of the columnar body fixed at a central part of the upper surface of a supporting substrate. A space between the columnar body and the annular detector is connected by a thin flexible connection member (diaphrapm). A washer-shaped insulation substrate is disposed on the upper surface of the supporting substrate, individual fixed electrodes are formed on the upper surface thereof, and they constitute capacitive elements together with a displacement electrode which is composed of the lower surface of the annular detector. Upon exertion of an external force on the annular detector, the flexible connection member deflects to cause displacement, which is detected as change in capacitance value of the capacitive element. |
