| 摘要 |
PROBLEM TO BE SOLVED: To provide a fume hood which allows a user to easily perform attaching/detaching work to a fastener of a buffle plate.SOLUTION: A buffle plate 19 is attached to a front face of a rear face plate 17 of a processing chamber 3 by using a fastener 24 and the buffle plate 19 forms an exhaust passage in a vertical direction. The fume hood comprises the above-mentioned structure. The fastener 24 has a base 70 having a sliding face 78 for sliding a lower end edge of the buffle plate 19, the sliding face 78 extends toward a front end part of the base 70, and a falling prevention piece 71 for preventing falling of the buffle plate 19 is attached to the base 70. |
